Platen Shield Cleaning System

ABSTRACT

In a chemical mechanical polishing system, a platen shield cleaning assembly is installed on a rotatable platen in a gap between the rotatable platen and a platen shield. The assembly includes a sponge holder attached to the platen and a sponge. The sponge is held by the sponge holder such that an outer surface of the sponge is pressed against an inner surface of the platen shield.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of U.S. application Ser.No. 16/909,947, filed on Jun. 23, 2020, the contents of which are herebyincorporated by reference.

TECHNICAL FIELD

The present disclosure relates to chemical mechanical polishing, andmore particularly to cleaning of a shield that surrounds a platen.

BACKGROUND

An integrated circuit is typically formed on a substrate by thesequential deposition of conductive, semiconductive, or insulativelayers on a silicon wafer. One fabrication step involves depositing afiller layer over a non-planar surface and planarizing the filler layer.For certain applications, the filler layer is planarized until the topsurface of a patterned layer is exposed. A conductive filler layer, forexample, can be deposited on a patterned insulative layer to fill thetrenches or holes in the insulative layer. After planarization, theportions of the conductive layer remaining between the raised pattern ofthe insulative layer form vias, plugs, and lines that provide conductivepaths between thin film circuits on the substrate. For otherapplications, such as oxide polishing, the filler layer is planarizeduntil a predetermined thickness is left over the non planar surface. Inaddition, planarization of the substrate surface is usually required forphotolithography.

Chemical mechanical polishing (CMP) is one accepted method ofplanarization. This planarization method typically requires that thesubstrate be mounted on a carrier or polishing head. The exposed surfaceof the substrate is typically placed against a rotating polishing pad.The carrier head provides a controllable load on the substrate to pushit against the polishing pad. A polishing liquid is typically suppliedto the surface of the polishing pad.

The polishing pad is typically supported on a rotatable platen. As theplaten and polishing pad rotate, centrifugal force tends to urge thepolishing liquid off the polishing pad. A platen shield can be placedaround the platen to prevent the polishing liquid being thrown off thepolishing pad from contaminating the work area.

SUMMARY

In one aspect, a platen shield cleaning system includes a platen shieldcleaning assembly for cleaning a platen shield of a chemical mechanicalpolishing system. The platen shield cleaning assembly is installed on arotatable platen in a gap between the rotatable platen and a platenshield. The assembly includes a sponge holder attached to the rotatableplaten and a sponge. The sponge is held by the sponge holder such thatan outer surface of the sponge is pressed against an inner surface ofthe platen shield.

Implementations may include one or more of the following features.

The sponge holder may include an adapter configured to be removablysecured to the rotatable platen. The adapter is configured to press thesponge against the inner surface of the platen shield. The adapter mayinclude a latch configured to be removably secured to a plug extendingfrom a platen. The sponge may be pressed against an inner surface of theplaten shield by a plurality of springs.

The sponge holder may include a latch and a backing piece. The latch maybe configured to be removably secured to a plug extending from a platen.The backing piece is connected to the latch and having an outer surfaceconfigured to receive a sponge. The outer surface is curved so as toconform the sponge to a platen shield inner surface profile. The spongemay be attached to the outer surface of the sponge holder by a hook andloop fixture. The sponge holder may be coupled to the backing piece bymultiple springs. The springs may be coupled to the backing piece andthe sponge holder by a plurality of fasteners.

The platen shield cleaning system may include an adapter and a spongeholder. The adapter may be configured to be removably secured to aplaten of a chemical mechanical polishing system. The sponge holder maybe connected to the adapter and having an outer surface configured toreceive a sponge and hold the sponge against an inner surface of aplaten shield that surrounds the platen. The adapter may include a latchconfigured to be removably secured to a plug extending from a platen.The adapter may include a support flange configured to abut a topsurface of the platen to prevent the adapter from rotating.

The platen shield cleaning system may include multiple springsinterposed between the adapter and the sponge holder to urge the spongeinto contact with the inner surface of the platen shield. Multiplecotter pins may hold the springs to the adapter and the sponge holder.

The platen shield cleaning system may include a sponge coupled to thesponge holder. The sponge may be couple to the sponge holder by a loopand hook fixture. The sponge may a dry sponge. The sponge may be a wetsponge.

In another aspect, a method of cleaning a platen shield includesinstalling a sponge and a sponge holder in a gap between a platen and aplaten shield, urging the sponge into contact with the platen shield,and rotating the platen and the platen, the sponge holder, and thesponge while the sponge is in contact with the platen shield.

Implementations may include one or more of the following features.

Installing the sponge and the sponge holder may include compressingmultiple spring interposed between the sponge and the sponge holder tomove the sponge and the sponge holder closer to each other and releasingthe spring interposed between the sponge and the sponge holder to movethe sponge and the sponge holder away from each other. Installing thesponge and the sponge holder may include placing a latch on the spongeholder over a plug on the platen. Installing the sponge and spongeholder may include placing a support flange configured to abut a topsurface of the platen to prevent the adapter from rotating.

The platen shield may be scraped with a dry sponge. The platen shieldmay be moistened with a wet sponge containing a cleaning solution andthe platen shield may be scraped with the wet sponge.

Implementations may optionally include, but are not limited to, one ormore of the following advantages. Polishing quality may be improved,e.g., fewer scratches and defects are created by dried abrasiveparticles from polishing slurry buildup detaching from the platen shieldduring the polishing process. Additionally, the quantity of wafersscrapped due to defects can be reduced. Maintenance down time for thepolishing system may be significantly decreased. This improvesproductivity of the polishing system and reduces operator time becauseless time is devoted to the platen shield cleaning process. Switchingbetween different modes of cleaning (i.e. dry cleaning and wet cleaning)is easier. The cleaning process can be quickly modified by adjustingtool pressure engagement with the platen shield.

The details of one or more implementations are set forth in theaccompanying drawings and the description below. Other aspects,features, and advantages will be apparent from the description anddrawings, and from the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A shows a schematic cross-sectional view of a chemical mechanicalpolishing system.

FIG. 1B shows a schematic cross-sectional view of a platen shieldcleaning system installed on the chemical mechanical polishing system ofFIG. 1 .

FIG. 2 shows a perspective view of the platen shield cleaning system ofFIG. 2 installed on the chemical mechanical polishing system of FIG. 1 .

FIG. 3 shows an exploded front perspective view of the platen shieldcleaning system of FIG. 2 .

FIG. 4 shows an exploded rear perspective view of the platen shieldcleaning system of FIG. 2 .

FIG. 5 shows a method of cleaning a platen shield.

Like reference numbers and designations in the various drawings indicatelike elements.

DETAILED DESCRIPTION

During chemical mechanical polishing, a polishing liquid, e.g., anabrasive polishing slurry, is supplied to the surface of the polishingpad. As the platen and polishing pad are rotated, the abrasivepolishing, the polishing liquid is thrown off the platen. A platenshield placed around the platen can serve as a barrier to block thepolishing liquid from contaminating the surrounding regions of thepolishing system.

Although some of the polishing liquid will flow off the shield and canbe collected in a basin, some of the polishing liquid can dry and buildup on the platen shield. The build up of dried polishing liquid on theplaten shield over time has multiple deleterious effects. For example,abrasive particles in the polishing liquid can form agglomerates whichcan be dislodged and return to the polishing surface, thus creating thedanger of scratching and defects. A significant amount of non-productivetime is required to clean the platen shield to prevent build-up of thedried polishing liquid.

A platen shield cleaning tool that can be easily attached to the platenand that does not require equipment dis-assembly can alleviate thesedeleterious effects.

FIG. 1A shows a polishing system 20 operable to polish a substrate 10.The polishing system 20 includes a rotatable platen 24, on which a mainpolishing pad 30 is situated and a platen shield 26 surrounding therotatable platen 24 and separated from the platen 24 by an annular gap22. As shown in FIG. 1B, a platen shield cleaning system 50 can bemechanically coupled to the rotatable platen 24 and interposed inbetween the rotatable platen 24 and the platen shield 26. The platenshield is circular and surrounds the rotatable platen 26. The platenshield can include a vertical cylindrical portion 26 a, and the top ofthe platen shield can be curved inward to form a lip 26 b. The lip 26 bcan be positioned above the vertical plane of the surface of the platen24.

The rotatable platen 24 is operable to rotate about an axis 28. Forexample, a motor 30 can turn a drive shaft 32 to rotate the rotatableplaten 24.

The polishing system 20 includes a carrier head 70 operable to hold thesubstrate 10 against the polishing pad 30. The carrier head 70 issuspended from a support structure 72, for example, a carousel or track,and is connected by a carrier drive shaft 74 to a carrier head rotationmotor 76 so that the carrier head can rotate about an axis 71. Inaddition, the carrier head 70 can oscillate laterally across thepolishing pad 30, e.g., by moving in a radial slot in the carousel 72 asdriven by an actuator, by rotation of the carousel as driven by a motor,or movement back and forth along the track as driven by an actuator. Inoperation, the platen 24 is rotated about its central axis 25, and thecarrier head is rotated about its central axis 71 and translatedlaterally across the top surface of the polishing pad 30.

The polishing system 20 can include a polishing liquid delivery arm 34.During polishing, the arm 34 is operable to dispense a polishing liquid36. The polishing liquid 36 can be a slurry with abrasive particles. Thepolishing liquid 36 can be referred to by multiple names, e.g., abrasivepolishing slurry, abrasive polishing liquid, or polishing slurry.Alternatively, the polishing system 20 can include a port in the platen24 operable to dispense the polishing liquid 36 onto the main polishingpad 30. As the platen 24 is rotated, the abrasive polishing, thepolishing liquid 36 is thrown off the platen 24. The platen shield 26placed around the platen 24 can serve as a barrier to block thepolishing liquid 36 from contaminating the surrounding regions of thepolishing system 20. Although some of the polishing liquid 36 will flowoff the platen shield 26 and can be collected below the polishing system20, some of the polishing liquid 36 can build up on the platen shield26. Subsequent polishing operations will continue to deposit polishingliquid 36 on the platen shield 26, and the polishing liquid 36 can dryand further accumulate on the platen shield 26.

A plug 60 is installed in a recess 42 in a cylindrical outside surface44 of the platen 24. The plug 60 is removable from the recess 42. Theplug 60 extends from the outside surface 44 into the gap 22. The plugcan be a plastic or a metal. The plug 60 is configured to mechanicallycouple to the platen shield cleaning system 50 (shown in FIG. 2 ).

FIG. 1B shows a platen shield cleaning system 50 installed in thepolishing system 20. The platen shield cleaning system 50 includes asponge holder 52 and a sponge 54. The sponge holder 52 biases the sponge54 against inside surface 38 of the platen shield 26 to clean the platenshield 26. The sponge 54 has an outer surface 56 that cleans the insidesurface 38 of the platen shield 26.

The sponge 54 is made of a soft, porous, absorbent material. The sponge54 can be made of a naturally occurring material or a syntheticmaterial. For example, the sponge 54 can formed from naturally occurringmaterial, such as vegetal cellulose, an animal sea sponge, hemp, or woodfiber. Alternatively, the sponge 54 can be formed from a syntheticmaterial, such as polyester or polyurethane.

The sponge holder 52 is removably attached to the platen 24 and situatedin the gap 22 between the platen 24 and the platen shield 26. The sponge54 is removably attached to the sponge holder, e.g., by a weak adhesivelayer coated on one surface of the sponge or by mechanical fasteners.

The sponge 54 is held by the sponge holder 52 such that an outer surface56 of the sponge 54 is pressed against an inner surface 38 of the platenshield 24. In operation, the rotatable platen 24 and the platen shieldcleaning system 50 rotate about the axis 28 with the sponge 54 engagingthe inner surface 38 of the platen shield 26. The circular sweep of thesponge 54 around the inner surface 38 of the platen shield 26 can scrapeoff buildup of the polishing liquid 36.

A cleaning chemical can be applied to the sponge 54 to facilitatecleaning of the platen shield 26. A chemical can be applied to thesponge 54 to further prevent subsequent polishing liquid 36 buildup onthe inner surface 38 of the platen shield 26. For example, de-ionizedwater, isopropyl alcohol, or potassium hydroxide can be applied to thesponge.

FIG. 2 shows a perspective view of a platen shield cleaning system 50installed in chemical mechanical polishing system 20. The platen shieldcleaning system 50 is mechanically coupled to the rotatable platen 24and interposed in between the rotatable platen 24 and the platen shield26.

FIG. 3 shows an exploded perspective view of the platen shield cleaningsystem 50 of FIG. 1 . FIG. 4 shows a rear exploded perspective view ofthe platen shield cleaning system 50. Referring to FIGS. 1, 3 and 4 ,the platen shield cleaning system 50 includes an adapter 66 configuredto be removably secured to the platen 24, and a sponge holder 52 with abacking piece 62 connected to the adapter 66 and having an outer surface64 configured to receive the sponge 54.

The outer surface 64 of the backing piece 62 is curved so as to conformthe sponge 54 to an inner surface 38 of the platen shield 26. Thebacking piece 62 can have a vertical section 84, an angled section 86,and a curved section 88 connecting the vertical section 84 to the angledsection 86. This configuration conforms the sponge 54 to the verticalsection 26 a and inwardly curving lip 26 b of the platen shield 26.

The sponge holder 52 includes a latching mechanism 58 to removablysecure the sponge holder to the plug 60. For example, the rear face 100of the adapter 66 adjacent the platen 24 can include a recess 92 intowhich the plug 60 can fit.

The adapter 66 includes a generally vertical main body 90 that will restagainst the cylindrical outer surface of the platen, and a supportflange 68 extending horizontally from a top edge of the main body 90 andconfigured to abut a top surface 40 of the pad or platen 24. The supportflange 68 can prevent the adapter 66 from rotating under the effect oftorque from the friction of the sponge against the platen shield. Theadapter 66 has a rear face 100 with a recess 92. The recess 92 isconfigured to accommodate the plug 60. The recess 92 has a ridge 102configured to latch onto the plug 60. The plug 60 slides vertically inthe recess 92 until constrained by the ridge 102. Alternatively, theclamp could grab the platen 26 and the adapter 66 then secured to theclamp.

The main body 90 has voids 104 connected to the recesses 96. The voids104 are sized to accommodate fastener 82.

The sponge holder 52 includes compression pins 94 protruding verticallyfrom the rear surface 106. The compression pins 94 compress springs 80into recesses 96 in the front face 102 of the adapter 66. Thecompression pins 94 can have vertical slits 98 that extend through thecompression pins 94. The vertical slits 98 are sized to accommodate afastener 82.

The sponge holder can made of a metal or a plastic. For example, thesponge holder can be steel, aluminum, high density polyethylene, or acomposite.

The sponge 54 can be removably attached to the sponge holder 52 by ahook and loop fixture. One half of the hook and loop fixture is attachedto the outer surface 64 by an adhesive. The other half of the hook andloop fixture is attached to the sponge 54 by an adhesive. The sponge 54can be a dry sponge or a wet sponge. A dry sponge does not have anyfluid chemicals added to the sponge. A wet sponge has a fluid added tothe sponge. A wet sponge can be used to can be used to scrape off drypolishing liquid 36 buildup, soften and loosen dry polishing liquid 36buildup, or to apply a chemical to the platen shield. For example, achemical can be applied to the platen shield to reduce or preventfurther dry polishing liquid 36 buildup. For example, a cleaning fluidcan be added to the sponge.

The platen shield cleaning system 50 includes springs 80 interposedbetween the adapter 66 and the sponge holder 52 to urge the sponge 54into contact with the inner surface 38 of the platen shield 26. Thesprings 80 fit into recesses 96 on the adapter 66. The springs 80 coupleto the sponge holder 52 and are compressed by the compression pins 94.The springs 80 can be permanently attached or removably secured. Thesprings 80 can be permanently attached by welding or gluing, forexample. The springs 80 can be removably secured by fasteners 82 likepins. For example, the fasteners 82 can be cotter pins. The platenshield cleaning system 50 can include fasteners 82 to hold the springs80 to the adapter 66 and the sponge holder 52. The springs 80 are placedin the recesses 96 of the adapter 66. The sponge holder 54 compressionpins 94 are coupled to the springs 80. A force is applied to the spongeholder 54 to compress the springs 80 into the recesses 96. The verticalslits 98 of the compression pins 94 are aligned with the voids 104 ofthe adapter 66. The cotter pins 82 are placed through the voids 104 andthe vertical slits 98, capturing the springs 80.

In particular, to attach the adapter 66 to the platen 24, the plug 60 isaligned and placed inside the recess 42 in the cylindrical outsidesurface 44 of the platen 24. Then, the rear face 100 of the adapter 66is aligned to the outside surface 44 of the platen 24. The adapterrecess 92 is aligned to the plug 60. The adapter recess 92 is coupled tothe recess 92. The adapter 66 vertically slides constrained by the plug60 and the recess 92. The plug 60 contacts the ridge 102 of the latchmechanism 58. The adapter 66 is movement is constrained. The spongeholder 54 is released. The sponge holder 54 moves to a fully extendedposition.

FIG. 5 shows a method 500 of cleaning a platen shield. At 502, aplurality of springs interposed between a sponge and a sponge holdercompress to move the sponge and the sponge holder closer to each other.At 504, the sponge and the sponge holder are installed in a gap betweena platen and a platen shield. At 506, a latch on the sponge holder isplaced over a plug on the platen. At 508, a support flange configured toabut a top surface of the platen to prevent the adapter from rotating isplaced on the top surface of the platen. At 510, the plurality of springinterposed between the sponge and the sponge holder release to move thesponge and the sponge holder away from each other. At 512, the sponge isurged into contact with the platen shield. At 514, the platen and theplaten, the sponge holder, with the sponge rotate in contact with theplaten shield. The sponge can be a dry sponge or a wet sponge moistenedwith a liquid. The liquid can be a cleaning solution or a buildupprevention solution.

Particular embodiments of the subject matter have been described. Otherembodiments are within the scope of the following claims.

What is claimed is:
 1. An assembly comprising: a rotatable platen; aplaten shield surrounding the platen and separated from the platen by agap; a sponge holder attached to the platen and situated in the gap; anda sponge held by the sponge holder such that an outer surface of thesponge is pressed against an inner surface of the platen shield.
 2. Theassembly of claim 1, wherein the sponge holder further comprises anadapter configured to be removably secured to the rotatable platen, theadapter configured to press the sponge against the inner surface of theplaten shield.
 3. The assembly of claim 2, wherein the adapter furthercomprises a latch configured to be removably secured to a plug extendingfrom a platen.
 4. The assembly of claim 2, wherein the adapter furthercomprises a support flange configured to abut a top surface of theplaten to prevent the adapter from rotating.
 5. The assembly of claim 2,comprising a plurality of springs interposed between the adapter and thesponge holder to urge the sponge into contact with the inner surface ofthe platen shield.
 6. The assembly of claim 5, comprising a plurality ofcotter pins that hold the plurality of springs to the adapter and thesponge holder.
 7. The assembly of claim 1, comprising a plurality ofsprings that press the sponge against an inner surface of the platenshield.
 8. The assembly of claim 1, wherein the sponge is coupled to thesponge holder by a loop and hook fixture.
 9. The assembly of claim 1,wherein the sponge is a dry sponge.
 10. The assembly of claim 1, whereinthe sponge is a wet sponge.
 11. A platen shield cleaning methodcomprising: installing a sponge and a sponge holder in a gap between aplaten and a platen shield; urging the sponge into contact with theplaten shield; and rotating the platen and the platen, the spongeholder, and, the sponge, the sponge in contact with the platen shield.12. The method of claim 11, wherein attaching the sponge and the spongeholder in the gap between the platen and the platen shield furthercomprises: compressing a plurality of spring interposed between thesponge and the sponge holder to move the sponge and the sponge holdercloser to each other; and releasing the plurality of spring interposedbetween the sponge and the sponge holder to move the sponge and thesponge holder away from each other.
 13. The method of claim 11, whereinattaching the sponge and the sponge holder in the gap between the platenand the platen shield further comprises placing a latch on the spongeholder over a plug on the platen.
 14. The method of claim 11, whereininstalling a sponge and a sponge holder in a gap between a platen and aplaten shield further comprises placing a support flange configured toabut a top surface of the platen to prevent the adapter from rotating.15. The method of claim 11, further comprising scraping the platenshield with a dry sponge.
 16. The method of claim 11, furthercomprising: moistening the platen shield with a wet sponge containing acleaning solution; and scraping the platen shield with the wet sponge.